Synthesis of indium oxide nanowires on quartz substrate for gas sensor

Abdulqader D. Faisal; Ali A.  Aljubouri; Wafaa Khalid Khalef

doi:10.6180/jase.202009_23(3).0010

Synthesis of indium oxide nanowires on quartz substrate for gas sensor

Abdulqader D. Faisal ¹, Ali A. Aljubouri This email address is being protected from spambots. You need JavaScript enabled to view it.¹, Wafaa Khalid Khalef ¹

¹University of Technology, Department of Applied Sciences, Baghdad, Iraq

Received: November 17, 2019
Accepted: April 7, 2020
Publication Date: September 1, 2020

Download Citation: ||https://doi.org/10.6180/jase.202009_23(3).0010

ABSTRACT

In this paper, Indium oxide nanowires (In₂O₃ NWs) were successfully synthesized on quartz substrate pre-coated with gold nanoparticles (Au NPs) using chemical vapor deposition (CVD). The nanowires were characterized via x-ray diffraction (XRD), scanning electron microscope (SEM), Ultraviolet-Visible (UV-VIS) spectrophotometer. The sputtered of Au NPs on quartz were analyzed by atomic force microscopy (AFM). The structural, morphological, and optical properties were investigated. The XRD structure reviled a single crystal, with cubic crystal, with preferred orientation along (222). The SEM revealed nanowires growth. The obtained band gap value of 3.6 eV confirmed the formation of In₂O₃ nanostructures. Regarding to the characteristics of In₂O₃ NWs, it was fabricated as an ethanol gas sensor at 10-1500 ppm and an optimized temperature of 210 ^oC. The minimum ethanol gas response of Ra/Rg = 1.6 was obtained at a concentration of 10 ppm. The corresponding response and recovery time were achieved at the lowest concentration of 10 ppm is 10 s and 10 s respectively. So, the In₂O₃ NWs film synthesized via CVD can be considered as a good ethanol gas sensor device at low concentration. In₂O₃ NWs growth and gas sensing mechanism were also explained.

Keywords: Chemical vapor deposition (CVD), Gas sensor, In2O3 nanowires

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